Description
Micropositioner, manipulator with probe arm and probe tip to probe on any IC chip device. The micropositioner is suitable for magnetic based probe station. Equipped with mechanisms to adjust the probe tip in three planes, X, Y, and Z. Precise micropositioner cost-effective and precise for I-V,C-V and RF probing.
Application
I-V/C-V, Pulsed I-V Probing, RF probing, OBIRCH, TIVA
Features
Ultra stable and precise – Precision micrometer heads are installed on one rigid base, which reduces vibration
from hand to the probe tips, truly accurate and stable for submicron probing.
Backlash free – Spring loaded X-Y-Z, stable and backlash free.
Linear motion – Precisely machined glides assures motion linearity
Specifications
Accuracy
X-Y-Z Travel Range
Mounting 0.5μm
12.5mm*12.5mm*12.5mm
Vacuum
Magnetic – W On/Off function, available upon request.
Specifications
Dimensions 133mm*35mm*111mm (W*D*H)